JPH069012Y2 - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPH069012Y2
JPH069012Y2 JP6940989U JP6940989U JPH069012Y2 JP H069012 Y2 JPH069012 Y2 JP H069012Y2 JP 6940989 U JP6940989 U JP 6940989U JP 6940989 U JP6940989 U JP 6940989U JP H069012 Y2 JPH069012 Y2 JP H069012Y2
Authority
JP
Japan
Prior art keywords
substrate
back plate
vacuum processing
tray
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6940989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311055U (en]
Inventor
勝彦 森
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP6940989U priority Critical patent/JPH069012Y2/ja
Publication of JPH0311055U publication Critical patent/JPH0311055U/ja
Application granted granted Critical
Publication of JPH069012Y2 publication Critical patent/JPH069012Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6940989U 1989-06-14 1989-06-14 真空処理装置 Expired - Lifetime JPH069012Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6940989U JPH069012Y2 (ja) 1989-06-14 1989-06-14 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6940989U JPH069012Y2 (ja) 1989-06-14 1989-06-14 真空処理装置

Publications (2)

Publication Number Publication Date
JPH0311055U JPH0311055U (en]) 1991-02-01
JPH069012Y2 true JPH069012Y2 (ja) 1994-03-09

Family

ID=31604687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6940989U Expired - Lifetime JPH069012Y2 (ja) 1989-06-14 1989-06-14 真空処理装置

Country Status (1)

Country Link
JP (1) JPH069012Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149094A (ja) * 2009-12-25 2011-08-04 Canon Anelva Corp 成膜装置及びクリーニング方法

Also Published As

Publication number Publication date
JPH0311055U (en]) 1991-02-01

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